UHP diaphragm valve
Straight-through, panel, multi-port and precursor-cylinder diaphragm valves for the highest purity gas lines.
Specifications
Technical specifications.
| Applications | Semiconductor, electronics specialty gas, PV |
| Variants | Straight-through, panel, multi-port, precursor cylinder |
| Cleaning | Cleanroom cleaning & helium leak test |
Key features
What it is built around.
01
Built for parts-per-trillion contamination control in gas delivery.
02
Diaphragm-sealed for leak-tight, particle-free operation.
03
ALD and precursor-cylinder valve groups available as custom assemblies.
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Brand overview
· Kinglai 新莱集团 · Ultra-high-purity gas systems